A NEGATIVE-WORKING PLASMA-DEVELOPED PHOTORESIST.

  • Goldrick M.
  • Taylor G.
  • Wolf T.

CHARACTERIZATION OF PLASMA-DEPOSITED SILICON DIOXIDE.

  • Adams A.
  • Alexander F.
  • Capio C.
  • Smith T.

GENERALIZED GUIDE FOR MOSFET MINIATURIZATION.

  • Brews J.
  • Fichtner W.
  • Nicollian E.
  • Sze S.

EB LITHOGRAPHY FOR SMALL MOSFET'S.

  • Fichtner W.
  • Fuls E.
  • Johnston R.
  • Thibault L.
  • Watts R.