Research Areas
Publications & Media
Consulting
Collaboration
About
Visit nokia.com
Research Areas
Network Fundamentals
Automation
Semiconductors and Devices
AI and Software Systems
Publications & Media
Blogs and articles
White papers
Media
Publications
Consulting
Communications service providers
Enterprises and industry
Webscalers
Collaboration
Entrepreneurs in Residence
Careers
Internships
Bell Labs Prize
Distinguished Academic Partners
ARENA2036
III-V Lab
About
Our people
Our women innovators
Locations
History
Awards
Press releases
In the media
Contact us
Home
Publications & Media
Publications
Topics
Chemistry
Crystallography
Science
Science and Mathematics
Spammers and Spamming
Telx
Wireless Handsets and other User Devices
Wireless Sensors
CRYSTALLOGRAPHIC ETCHING OF GALLIUM ARSENIDE WITH BROMINE AND CHLORINE PLASMAS.
1 January 1983
2013-11-14T23:12:29+00:00
2014-04-04T22:13:35+00:00
6a6000a9d8314c1e88a1c5fe9611c532e4a104dc
1706
latest